TMC Mask Manufacture Improve
TMC Advanced Writer
eBeam
JBX3200
Technology node : 14 – 40nm
Technology node : 14 – 40nm
JBX3050
Technology node : 40 – 65nm
Technology node : 40 – 65nm
Laser
Alta4700DP
Technology node : 80 – 150nm
Technology node : 80 – 150nm
Alta4700
Technology node : 110 – 180nm
Technology node : 110 – 180nm